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Monte Carlo Simulation of SEM and SAM Images

Written By

Y.G. Li, S.F. Mao and Z.J. Ding

Submitted: 09 July 2010 Published: 28 February 2011

DOI: 10.5772/16171

From the Edited Volume

Applications of Monte Carlo Method in Science and Engineering

Edited by Shaul Mordechai

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Written By

Y.G. Li, S.F. Mao and Z.J. Ding

Submitted: 09 July 2010 Published: 28 February 2011