Open access peer-reviewed chapter

Monte Carlo Simulation of SEM and SAM Images

Written By

Y.G. Li, S.F. Mao and Z.J. Ding

Submitted: July 9th, 2010Reviewed: November 22nd, 2010Published: February 28th, 2011

DOI: 10.5772/16171

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Written By

Y.G. Li, S.F. Mao and Z.J. Ding

Submitted: July 9th, 2010Reviewed: November 22nd, 2010Published: February 28th, 2011