Open access peer-reviewed chapter

Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst

By Sachiko Ono and Hidetaka Asoh

Submitted: May 1st 2011Reviewed: November 8th 2011Published: February 1st 2012

DOI: 10.5772/34387

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Sachiko Ono and Hidetaka Asoh (February 1st 2012). Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst, Noble Metals, Yen-Hsun Su, IntechOpen, DOI: 10.5772/34387. Available from:

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