Open access peer-reviewed Edited Volume

Ion Implantation

Research and Application

Edited by Ishaq Ahmad

National Center for Physics

Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials.

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Ion ImplantationResearch and ApplicationEdited by Ishaq Ahmad

Published: June 14th 2017

DOI: 10.5772/65528

ISBN: 978-953-51-3238-7

Print ISBN: 978-953-51-3237-0

eBook (PDF) ISBN: 978-953-51-4793-0

Copyright year: 2017

Books open for chapter submissions

6845 Total Chapter Downloads

2 Crossref Citations

3 Web of Science Citations

4 Dimensions Citations


Open access peer-reviewed

1. Introductory Chapter: Introduction to Ion Implantation

By Ishaq Ahmad and Waheed Akram


Open access peer-reviewed

2. Metal Ions Implantation‐Induced Effects in GaN Thin Films

By Ghulam Husnain and Morgan Madhuku


Open access peer-reviewed

3. MeV Electron Irradiation of Ion-Implanted Si-SiO2 Structures

By Sonia B. Kaschieva and Sergey N. Dmitriev


Open access peer-reviewed

4. Ion-Beam-Induced Defects in CMOS Technology: Methods of Study

By Yanina G. Fedorenko


Open access peer-reviewed

5. Development of Optical Waveguides Through Multiple-Energy Ion Implantations

By Heriberto Márquez Becerra, Gloria V. Vázquez, Eder G. Lizárraga- Medina, Raúl Rangel-Rojo, David Salazar and Alicia Oliver


Open access peer-reviewed

6. Surface Modification of Silicone Rubber by Ion Implantation to Improve Biocompatibility

By Xin Zhou, Yiming Zhang, Xiaohua Shi and Dongli Fan


Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI

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