Open access peer-reviewed chapter

Effect of Dielectric in a Plasma Annealing System at Atmospheric Pressure

By N.D. Tran , N. Harada, T. Sasaki and T. Kikuchi

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Published: October 3rd 2012

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N.D. Tran , N. Harada, T. Sasaki and T. Kikuchi (October 3rd 2012). Effect of Dielectric in a Plasma Annealing System at Atmospheric Pressure, Dielectric Material Marius Alexandru Silaghi, IntechOpen, DOI: 10.5772/50594. Available from:

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