Open access peer-reviewed chapter

Monte Carlo Simulation of SEM and SAM Images

By Y.G. Li, S.F. Mao and Z.J. Ding

Submitted: July 9th 2010Reviewed: November 22nd 2010Published: February 28th 2011

DOI: 10.5772/16171

Downloaded: 4012

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Y.G. Li, S.F. Mao and Z.J. Ding (February 28th 2011). Monte Carlo Simulation of SEM and SAM Images, Applications of Monte Carlo Method in Science and Engineering, Shaul Mordechai, IntechOpen, DOI: 10.5772/16171. Available from:

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