Open access peer-reviewed chapter

Silicon Photodiodes for Low Penetration Depth Beams such as DUV/VUV/EUV Light and Low-Energy Electrons

By Lis K. Nanver

Submitted: June 8th 2010Reviewed: October 26th 2010Published: March 22nd 2011

DOI: 10.5772/15396

Downloaded: 3893

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Lis K. Nanver (March 22nd 2011). Silicon Photodiodes for Low Penetration Depth Beams such as DUV/VUV/EUV Light and Low-Energy Electrons, Advances in Photodiodes, Gian Franco Dalla Betta, IntechOpen, DOI: 10.5772/15396. Available from:

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