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Edited by Michael Wang, ISBN 978-953-307-064-3, 678 pages, Publisher: InTech, Chapters published February 01, 2010 under CC BY-NC-SA 3.0 license
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.
This book is indexed in the Book Citation Index in Web of Science™ Core Collection (BKCI). BKCI is part of the Web of Science Core Collection (WoSCC) together with SCI Expanded, SSCI, AHCI and other databases.