Open access peer-reviewed Edited Volume

Lithography

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147,886 Chapter Downloads

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Academic Editor

Michael Wang
Michael Wang

University of Miami,
USA

Published01 February 2010

Doi10.5772/45639

ISBN978-953-307-064-3

eBook (PDF) ISBN978-953-51-4561-5

Copyright year2010

Number of pages678

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Edited Volume and chapters are indexed in

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Table of Contents

Open access  chapters

3. Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

6,781
3
4. Femtosecond Laser Nonlinear Lithography

By Hiroaki Nishiyama and Yoshinori Hirata

4,831
5. Improving the Efficiency of Pattern Extraction for Character Projection Lithography using OPC Optimization

By Hirokazu Nosato, Hidenori Sakanashi, Masahiro Murakawa and Tetsuya Higuchi

2,310
6. Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

By N.I. Chkhalo, A.E. Pestov, N.N., Salashchenko and M.N. Toropov

3,763
2
7. Advances in Resist Materials and Processing Technology: Photonic Devices Fabricated by Direct Lithography of Resist/Colloidal Nanocrystals Blend

By Antonio Qualtieri, Tiziana Stomeo, Luigi Martiradonna, Roberto Cingolani and Massimo De Vittorio

3,126
10. Grazing Incidence Mirrors for EUV Lithography

By Mariana Braic, Mihai Balaceanu and Viorel Braic

5,313
11. Steady-State and Time-Dependent LPP Modeling

By White, Dunne, and O’Sullivan

3,381
12. Nano-Crystalline Diamond Films for X-ray Lithography Mask

By Linjun Wang, Jian Huang, Ke Tang and Yiben Xia

2,863
2
13. High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

8,999
3
16. The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution

By Mohammad A. Mohammad, Taras Fito, Jiang Chen, Steven Buswell, Mirwais Aktary, Steven K. Dew and Maria Stepanova

3,341
1
23. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

17,462
22
24. Nanoimprint Lithography

By Thomas Glinsner and Gerald Kreindl

5,627
4
2,491
4,832
1
29. Metal Particle-Surface System for Plasmonic Lithography

By V. M. Murukeshan, K. V. Sreekanth and Jeun Kee Chua

3,460
4,180
1

IMPACT OF THIS BOOK AND ITS CHAPTERS

147,886 Total Chapter Downloads

12,975 Total Chapter Views

74 Crossref Citations

118 Web of Science Citations

142 Dimensions Citations

29 Altmetric Score

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