1 Open Access Books

81 Authors and Editors

118 Web of Science Citations

61 Crossref Citations

128 Dimension Citations

Inside the subject

1 peer-reviewed open access book

Top 5 Most cited chapters in this subject

Open Access Peer-reviewed Chapters

Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of the book: Lithography

17,551
22
High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of the book: Lithography

9,103
3
Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of the book: Lithography

4,876
1
Nano-Crystalline Diamond Films for X-ray Lithography Mask

By Linjun Wang, Jian Huang, Ke Tang and Yiben Xia

Part of the book: Lithography

2,894
2
Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

Part of the book: Lithography

6,828
3

Top 5 Most downloaded chapters in this subject in the last 30 days

Open Access Peer-reviewed Chapters

Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of the book: Lithography

17,546
22
Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

Part of the book: Lithography

6,827
3
High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of the book: Lithography

9,097
3
Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of the book: Lithography

4,875
1
4,888