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Engineering » Industrial Engineering and Management » "Manufacturing System", book edited by Faieza Abdul Aziz, ISBN 978-953-51-0530-5, Published: May 16, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 1

Particle Reduction at Metal Deposition Process in Wafer Fabrication

By Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff
DOI: 10.5772/38239



Submission date: 20. October, 2011.
Review date: 28. October, 2011.
Published online: 16. May, 2012.


Fig. 1. Accumulated downloads from the online publication date up to today.



Fig. 2. Accumulated download share from the online publication date up to today for top 5 countries from which this publication was accessed.



Fig. 3. Pie chart shows the download share by TOP 5 countries from which this publication was accessed.



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Taiwan385
China300
Malaysia260
Germany233
Singapore221
United Kingdom220
Japan193
Asia/Pacific Region178
Canada119
France87
Philippines78
Mexico77
Netherlands65
Brazil64
Iran, Islamic Republic of60
Italy58
Turkey57
Nigeria54
Thailand47
Indonesia45
Vietnam43
Europe43
Australia42
Russian Federation40
Switzerland38
Romania35
Israel34
Spain33
Belarus32
Denmark30
Hong Kong29
Egypt27
Portugal25
Belgium25
Poland25
Greece22
Sri Lanka21
Ireland21
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Sweden14
Hungary14
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Palestinian Territory6
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Syrian Arab Republic5
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Sudan5
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Madagascar1
Kazakstan1
Ghana1
Jamaica1
Macedonia1
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