Engineering » Industrial Engineering and Management » "Manufacturing System", book edited by Faieza Abdul Aziz, ISBN 978-953-51-0530-5, Published: May 16, 2012 under CC BY 3.0 license

Chapter 1

Particle Reduction at Metal Deposition Process in Wafer Fabrication

By Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff
DOI: 10.5772/38239



Submission date: 20. October, 2011.
Review date: 28. October, 2011.
Published online: 16. May, 2012.


Fig. 1. Accumulated downloads from the online publication date up to today.



Fig. 2. Accumulated download share from the online publication date up to today for top 5 countries from which this publication was accessed.



Fig. 3. Pie chart shows the download share by TOP 5 countries from which this publication was accessed.



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China143
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United Kingdom123
Korea, Republic of108
Asia/Pacific Region103
Malaysia96
Japan96
Germany88
Singapore78
Mexico65
Canada63
Brazil58
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Turkey49
Italy42
Philippines40
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Thailand35
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Indonesia33
France33
Spain31
Netherlands30
Belarus30
Australia26
Egypt25
Romania25
Russian Federation24
Europe22
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Greece20
Poland20
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Algeria18
Ireland18
Tunisia14
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Ukraine8
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Unknown1197