Engineering » Industrial Engineering and Management » "Manufacturing System", book edited by Faieza Abdul Aziz, ISBN 978-953-51-0530-5, Published: May 16, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 1

Particle Reduction at Metal Deposition Process in Wafer Fabrication

By Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff
DOI: 10.5772/38239



Submission date: 20. October, 2011.
Review date: 28. October, 2011.
Published online: 16. May, 2012.


Fig. 1. Accumulated downloads from the online publication date up to today.



Fig. 2. Accumulated download share from the online publication date up to today for top 5 countries from which this publication was accessed.



Fig. 3. Pie chart shows the download share by TOP 5 countries from which this publication was accessed.



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Unknown1357