Materials Science » Semiconductors » "Ion Implantation", book edited by Mark Goorsky, ISBN 978-953-51-0634-0, Published: May 30, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 5

Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

By Denis Shamiryan and Dmitriy V. Likhachev
DOI: 10.5772/37758