Engineering » Electrical and Electronic Engineering » "Advances in Solid State Circuit Technologies", book edited by Paul K Chu, ISBN 978-953-307-086-5, Published: April 1, 2010 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 16

Hafnium-based High-k Gate Dielectrics

By A. P. Huang, Z. C. Yang and Paul K. Chu
DOI: 10.5772/8631