About the book
Modern-day electronics have thrived on the foundations of experimental charged particle scattering results. Since the discovery of the electron by JJ Thompson in 1897, the physics of electron scattering has been extensively studied and exploited in fields ranging from the development of analytical tools and techniques for instrumentation and measurement to the study of structural, electronic and optical properties in materials and devices. Applications of charged particle scattering are found in high-resolution microscopy, studies of the structure of the nucleus and modeling of electron-beam lithography processes, for example; or understanding thin film deposition processes, transport properties in 2D materials, as well as at internal interfaces and multilayers, and at surfaces, of bulk materials.
Here, the book provides coverage on a range of advanced research that rests on the different types of scattering in particle physics, viz Compton scattering, Rutherford scattering, Møller scattering, Mott scattering, Bhabha scattering, Bremsstrahlung scattering, deep inelastic scattering, and synchrotron emission, for example. Written by a team of internationally renowned experts, with contributions from universities, research institutes and industries, this book is suitable for students and professors, researchers, engineers and scientists, who are interested in staying up to date with state-of-the-art fundamental and technological developments in the application of charged particle scattering with solids such as metals, semiconductors and insulators, for advanced characterizations of materials as well as of the limiting factors in the fabrication and performance of say, integrated circuits and transistors.