Chapters authored
Focused Ion Beam Tomography
To study the fundamental effect of shape and morphology of any material on its properties, it is very essential to know and study its morphology. Focused ion beam (FIB) tomography is a 3D chemical and structural relationship studying technique. The instrumentation of FIB looks like that of the scanning electron microscopy (SEM), but there is a major difference in the beam used for scanning. For SEM, a beam of electrons is used with scanning medium whereas in FIB, a much focused beam of ions is used for scanning. FIB can be used for lithography and ablation purposes, but due to advancements and high-energy focused beam, it is nowadays being used as a tomographic technique. Tomography is defined as imaging by sectoring or cross-sectioning any desired area. The hyphenation of FIB with energy-dispersive spectrometry or secondary ion mass spectrometry can give us elemental analysis with very high-resolution 3D images for a sample. This technique contributes to acquaintance of qualitative and quantitative analyses, 3D volume creations, and image processing. In this chapter, we will discuss the advancements in FIB instrumentation and its use as 3D imaging tool for different samples ranging from nanometer (nm)-sized materials to micrometer (μm)-sized biological samples.
Part of the book: Ion Beam Techniques and Applications