In this chapter we present the theory of phononic crystal, classification of PnC according to its physical nature, and phononic crystal (PnC) phenomena in locally resonant materials with 2D, and 3D crystals structure. In this chapter, phononic crystal (PnC) micro-electro mechanical system (MEMS) resonators with different transduction schemes such as electrostatically, piezoresistively, piezoelectrically transduced MEMS resonators are explained. In this chapter, we employed phononic crystal strip in MEMS resonators is explained to reduce anchor loss, and analysis of eigen frequency mode of the resonators. The phononic crystal strip with supporting tethers is designed to see the formation of band gap by introducing square holes, and improvement of quality factor and harmonic response. We show that holes can help to reduce the static mass of PnC strip tether without affecting on band gaps.
Part of the book: Phonons in Low Dimensional Structures