This chapter presents the results of experimental studies of the electrical, mechanical and geometric parameters of vertically aligned carbon nanotubes (VA CNTs) using scanning probe microscopy (SPM). This chapter also presents the features and difficulties of characterization of VA CNTs in different scanning modes of the SPM. Advanced techniques for VA CNT characterization (the height, Young’s modulus, resistivity, adhesion and piezoelectric response) taking into account the features of the SPM modes are described. The proposed techniques allow to overcome the difficulties associated with the vertical orientation and high aspect ratio of nanotubes in determining the electrical and mechanical parameters of the VA CNTs by standard methods. The results can be used in the development of diagnostic methods as well as in nanoelectronics and nanosystem devices based on vertically aligned carbon nanotubes (memory elements, adhesive structures, nanoelectromechanical switches, emission structures, etc.).
Part of the book: Atomic-force Microscopy and Its Applications