Cost-effective and mass production of size-controlled wafers becomes one of the future trends for electronic devices. Herein, we design a Minimal Fab system for the growth of half-inch-diameter silicon wafer devices. Different from the conventional chemical vapour deposition (CVD) systems, a new-type of CVD reactor was designed and developed for the Minimal Fab. The minimal CVD reactor has a small reaction chamber for rapid growth processes. It employed (i) a vertical gas flow, (ii) heating modules using concentrated infrared light, (iii) chlorine trifluoride gas for quick reactor cleaning and (iv) optimized epitaxial growth conditions so that the reactor cleaning is not necessary. Reducing the total gas flow rate is an effective way to increase the wafer temperature. The heating process was further assisted by the absorption of infrared light by the precursor trichlorosilane. The slimly designed reflector could help in improving the heating speed.
Part of the book: Epitaxy
Metallic glasses (MGs) are an unusual class of materials that possess an amorphous atomic-level structure and display a plethora of desirable mechanical, chemical and physical properties, which makes them one of the most promising engineering materials. However, the poor processability of metallic glasses greatly hindered their engineering applications. Though some techniques have been developed to fabricate metallic glass components, the unique superplasticity of supercooled liquid metallic glasses attracts enduring attentions, which allows thermoplastic forming of metallic glasses on length scales ranging from atomic-size to centimeter and especially offers an alluring prospect in the field of microfabrication. While some pivotal aspects during thermoplastic forming of metallic glasses should be addressed, for example, the evaluation of thermoplastic formability and its relationship with material flowing characteristic, the required thermoplastic forming techniques for processing MG components with high quality and the potential applications of these thermoplastic formed textures are compressively reviewed in this chapter.
Part of the book: Metallic Glasses