Ion beam material diagnostic possibilities are discussed. Experimental data of H+ and He+ ion beams interaction with material for the energy range 0.8–1.6 MeV are presented. There are described the conventional ion beam analytical complex facility and some peculiarities featured for Sokol-3 IMT RAS one. Common characteristics of ion beam analytical methods are described. Specific attention is focused on the ion beam methods use for real objects investigations. It is shown that these methods are very effective for the light element diagnostics. New technology for the element surface analysis on base of the PIXE method modification by the planar X-ray waveguide-resonator application is elaborated. Attention is drowning to facts that all ion beam experimental methods are nondestructive and the Rutherford backscattering spectrometry is real quantitative analytical procedure.
Part of the book: Ion Beam Applications