Akio Sanpei

By Yasuaki Hayashi and Akio Sanpei

The size and refractive index of particles can be analyzed through the measurement of polarization state of scattered light. The change of polarization state in Mie scattering has been represented by ellipsometric parameters, Ψ and Δ, like the reflection ellipsometry. The analysis method is called Mie-scattering ellipsometry. By in-process Mie-scattering ellipsometry, the growth processes of carbon particles in argon plasma and in methane plasma were analyzed. It was found that carbon particles grow by coagulation in argon plasma, while they grow by carbon coating in methane plasma. It is also shown that imaging Mie-scattering ellipsometry has the potential for the easier confirmation of optical adjustment from a long distance, as well as for the analysis of spatial distribution of particle size.

Part of the book: Ellipsometry

By Akio Sanpei

The integral photography technique has an advantage in which instantaneous three-dimensional (3D) information of objects can be estimated from a single-exposure picture obtained from a single viewing port. Recently, the technique has come into use for scientific research in diverse fields and has been applied to observe fine particles floating in plasma. The principle of integral photography technique and a design of a light-field camera for dusty plasma experiments are reported. The important parameters of the system, dependences of the size of the imaging area, and the spatial resolution on the number of lenses, pitch, and focal length of the lens array are calculated. Designed recording and reconstruction system is tested with target particles located on known positions and found that it works well in the range of dusty plasma experiment. By applying the integral photography technique to the obtained experimental image array, the 3D positions of dust particles floating in an RF plasma are identified.

Part of the book: Progress in Fine Particle Plasmas