Macroporous silicon (MPS) is a versatile material that since its origin in the early 1990s has seen intense research and has found applications in many fields. MPS is a key technology in photonic crystals research, and optic and photonic applications are its main applications. However, this chapter is devoted to several of the non‐photonic uses of MPS. In particular, new electronic and MEMS devices and applications will be described. Furthermore, in this chapter, the technology of MPS fabrication will be presented.
Part of the book: New Research on Silicon
Macroporous silicon (MPS) has been shown to be a promising material in many areas of technical interest. In particular, MPS has been applied for electronic devices and microfluidic applications. One of the most promising features of MPS is that it enables the development of optical applications using simple and cost-effective technology, compatible with MEMS fabrication processes and suitable for mass production. This chapter describes the application of MPS structures fabricated using electrochemical etching (EE) for the detection of gases of environmental concern in the wavelength range comprising 4 μ m to 15 μ m , such as C O 2 . Vertical-modulated MPS structures are reported, whose photonic bandgaps can be placed at different wavelengths depending on the application needs. These structures have been applied to the quantification of C O 2 , and these results are summarised here. Detection is performed by the direct measure of absorption, obtaining promising results with short optical paths.
Part of the book: Applications of Silicon Photonics in Sensors and Waveguides