Yu Faye Chao
retired, became specialized in constructing ellipsometer from a theoretical physicist.
retired, became specialized in constructing ellipsometer from a theoretical physicist.
A three-intensity measurement technique in a polarizer-sample-analyzer (PSA) ellipsometry will be introduced. The alignment of the azimuth angle of polarizer and analyzer to the incident plane will be discussed. Its applications to measure the ellipsometric parameters for deducing the optical parameters will be stated. In addition to the PSA ellipsometry, one can insert a photoelastic modulator (PEM) in the PSA ellipsometry for developing a PEM ellipsometry. There is no moving part in the system and its measuring speed is only limited by a modulator. An in situ/real-time and post-flight ellipsometry can be established for monitoring the dynamically varying process.
Part of the book: Ellipsometry