Three high-power excimer laser systems with apertures of 25 and 40 cm of the output laser beam are described. The first and second laser systems consist of four and five excimer lasers, respectively. Third system consists of Ti:Sa front end and XeF(C-A) amplifier. The experimental results of the generation of the high-quality and high-power laser pulses are presented. Laser beams with pulse energy of up to 330 J (308 nm, 250 ns) and peak power 14 TW (450 nm, 50 fs) were obtained.
Part of the book: High Power Laser Systems