This chapter introduces our research on amorphous silicon photonics. By exploring our high-quality silicon thin-film technology, we have demonstrated hydrogenated amorphous silicon (a-Si:H) waveguides with ultra-low-loss, vertical interlayer transition (VIT) devices for cross coupling between vertically stacked optical circuits. These device technologies are promising for three-dimensional photonic integrated circuits integrated in microelectronics chips. A record low loss of 0.6 dB cm−1 was achieved for a submicron-scale single-mode waveguide, and the VIT devices allow low-loss, broadband, and polarization-insensitive operation.
Part of the book: Crystalline and Non-crystalline Solids