Masato Sone

Tokyo Institute of Technology

Prof. Masato Sone completed his doctor degree in engineering at the age of 28 at Tokyo Institute of Technology. He worked as a researcher in the Nippon Oil Company from 1996 to 2000. He was an assistant professor and then a research associate professor at Tokyo University of Agriculture and Technology from 2000 to 2005. He attained his current position of associate professor and full professor at Tokyo Institute of Technology in 2005. He has published more than 170 papers in scientific journals. His interests are microelectronics, metallurgy, surface finishing, chemical engineering, and liquid crystal and polymer science. His recent topic of interest is material design and the evaluation of electroplated gold alloys for high-sensitivity CMOS-MEMS accelerometers.

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Latest work with IntechOpen by Masato Sone

Gold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In the field of MEMS devices, the demand for continuous miniaturization and sensitivity enhancement is always high. Especially for MEMS accelerometers, sensitivity is affected by Brownian noise, and components with sufficient mass are needed to suppress this noise. Therefore, it is difficult to reduce the dimensions of components to allow further miniaturization of the device. This book presents recent progress in noble metal electrodeposition and applications of gold-based materials in the realization of highly sensitive CMOS-MEMS accelerometers.

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