Open access peer-reviewed chapter

Numerical Simulation of Plasma-Chemical Processing Semiconductors

By Yurii N. Grigoryev and Aleksey G. Gorobchuk

Published: December 1st 2009

DOI: 10.5772/7012

Downloaded: 2130

© 2009 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Yurii N. Grigoryev and Aleksey G. Gorobchuk (December 1st 2009). Numerical Simulation of Plasma-Chemical Processing Semiconductors, Micro Electronic and Mechanical Systems, Kenichi Takahata, IntechOpen, DOI: 10.5772/7012. Available from:

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