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Numerical Simulation of Plasma-Chemical Processing Semiconductors

Written By

Yurii N. Grigoryev and Aleksey G. Gorobchuk

Published: 01 December 2009

DOI: 10.5772/7012

From the Edited Volume

Micro Electronic and Mechanical Systems

Edited by Kenichi Takahata

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Written By

Yurii N. Grigoryev and Aleksey G. Gorobchuk

Published: 01 December 2009