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Polycrystalline Silicon Piezoresistive Nano Thin Film Technology

Written By

Xiaowei Liu, Changzhi Shi and Rongyan Chuai

Published: January 1st, 2010

DOI: 10.5772/6886

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Written By

Xiaowei Liu, Changzhi Shi and Rongyan Chuai

Published: January 1st, 2010