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Carbon Nanotube Interconnect Technologies for Future LSIs

Written By

Mizuhisa Nihei, Akio Kawabata, Motonobu Sato, Tatsuhiro Nozue, Takashi Hyakushima, Daiyu Kondo, Mari Ohfuti, Shintaro Sato and Yuji Awano

Published: January 1st, 2010

DOI: 10.5772/6882

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Written By

Mizuhisa Nihei, Akio Kawabata, Motonobu Sato, Tatsuhiro Nozue, Takashi Hyakushima, Daiyu Kondo, Mari Ohfuti, Shintaro Sato and Yuji Awano

Published: January 1st, 2010