Abstract
This chapter is dedicated to the processes linked with the collection of photo-generated carriers in silicon heterojunction (SHJ) solar cells with a focus on the key role of the amorphous silicon/crystalline silicon heterojunction. The intention is to explain the role of carrier inversion at the heterointerface and connect it with the properties of the SHJ to obtain deeper understanding of carrier transport properties and collection, which goes beyond amorphous silicon-based structures and will contribute to understanding the new emerging SHJ based on amorphous silicon oxide and metal oxide emitter layers. The study is extended by a simulation of the TCO/emitter interface with the aim to reveal the effect of parasitic Schottky barrier height on the performance of the SHJ solar cell. In addition, the simulation study of SHJ under concentrated light and varied temperatures is outlined to show the main limitations and prospects of SHJ structures for utilization under concentrated light.
Keywords
- amorphous silicon
- heterojunction
- carrier inversion
- open-circuit voltage
- ASA simulation
1. Introduction
Among the semiconductor materials with suitable optoelectronic properties for photovoltaic applications, silicon has been the most widely accepted and used in the current production of photovoltaic modules. The basic advantage of silicon is its abundance in nature and mastered silicon wafer fabrication, as well as the compatibility of the technological processes of solar cells with the microelectronics industry. The increasing cost of processed crystalline silicon ingots in the past years became a driving force decreasing the wafer thickness for solar cell fabrication [1]. However, this trend was stopped due to the bending of thin wafers during high temperature processing of standard silicon solar cells, which results into the increasing efforts focused on the technologies with lower silicon usage. Among them, the silicon heterojunction solar cells (SHJ) provide both high performance together with a perspective of low-cost fabrication and decrease of silicon wafers thickness bellow 100 µm [2]. The advantages of heterojunction between amorphous and crystalline silicon were first introduced into the so-called HIT concept (Hetero-junction with Intrinsic Thin-layer) by former company SANYO (currently SANYO is part of the company Panasonic) in 1992 [3]. The SHJ HIT solar cell is composed of a single thin crystalline silicon wafer, c-Si surrounded by ultra-thin intrinsic silicon layers, a-Si:H(i) and n-type and p-type doped amorphous silicon layers, a-Si:H (Figure 1), which can be deposited at temperature below 200°C and so can be used in processing of thin wafers. On the two doped layers, transparent conducting oxide (TCO) layers and metal electrodes are formed with sputtering and screen-printing methods, respectively. The TCO layer on the top also works as an anti-reflection layer.

Figure 1.
Silicon heterojunction solar cells with on n-type silicon (SHJn) and n-type silicon (SHJp) hetero-junction with intrinsic thin-layer (HIT) solar cell.
Since the first introduction, the HIT solar cells have been the subject of extensive research. Recently, the record efficiency
1.1. Current trends in SHJ solar cell development
To make the SHJ solar cells more economically attractive, current efforts are focused on the development of technologies and approaches focused on two main objectives (i) to increase the efficiency and (ii) to decrease the fabrication costs. The utilization of emitters with a large band gap such as amorphous silicon carbide a-SiC:H [8], nanocrystalline silicon oxide nc-SiOx:H [9] or micro-crystalline silicon oxide μc-SiOx:H [10], thus lowering light absorption is a common approach on how to increase
The decrease of fabrication cost can be realized through the replacement of expensive materials by cheaper alternatives. Several groups have investigated alternative materials such as zinc oxide, ZnO [11], and indium zinc oxide, IZO [12], as a replacement of expensive indium tin oxide, ITO. Replacement of silver used in the collection electrodes by copper [1, 13] is another way, and is currently highly investigated to decrease SHJ cost.
Another approach to make SHJ cells more economically attractive is based on the reduction of silicon wafer thickness. The ability of HIT structure to use silicon wafers of low thicknesses and to achieve high performance at the same time was demonstrated already in 2009, when the SHJ HIT solar cell with a conversion efficiency of 22.8% prepared on a 98 μm thick n-type silicon wafer was introduced by former company Sanyo (currently Panasonic) [2].
Nowadays, new advance concepts are emerging based on the replacement of the amorphous emitter by metal oxides [14–16]. Such a concept has the ability to provide both an increase of efficiency as well as a decrease of fabrication cost. Metal oxides provide advantages of large band gaps, thus lower parasitic absorption in the emitter, simpler deposition by thermal evaporation [13] and no requirements of toxic dopant gases during fabrication. Moreover, the deposition of such oxides can be carried out at low temperatures leading to a further decrease of the thermal budget and hence fabrication cost. Metal oxides are widely used as a hole transport layers in organic solar cells [16, 17]. Current attempts to transfer them into the SHJn technology show very promising results with achieved efficiency of
1.2. Aim of this chapter
Two targets have to be attained for the good performance of solar cells: (i) light has to be absorbed in the absorption layer of the solar cell and (ii) the photo-generated carriers have to be effectively collected by the top and bottom collection electrodes. The first target is focused on the improvement of light management, which with the decreasing of the c-Si substrate thickness starts to be important also for SHJ solar cell. The optimization of TCO [12, 20], tuning of emitter layer band gap [8] and texturization of c-Si [21] are crucial to achieve high
The aim of this chapter is to explore the processes connected with the collection of photo-generated carriers and to explain the key role of the front a-Si:H/c-Si and TCO/a-Si:H interfaces for carrier recombination processes. ASA simulation is carried out to provide an insight into the charge properties of both a-Si:H/c-Si and TCO/a-Si:H junctions forming the front emitter stack of the SHJ solar cell and to explore their interconnection. Strong emphasis is focused on the presence of carrier inversion at the a-Si:H/c-Si, which is the most determining factor for
1.3. Simulation set-up
The ASA simulation program was used for characterization of recombination processes in the SHJ structure. This program is designed for the simulation of solar cells based on a-Si:H and c-Si semiconductors. ASA program solves the Poisson equation and continuity equations for electrons and holes in one dimension and includes several physical models which describe the trapping and generation/recombination processes in the structures with consideration of spatial disorder of amorphous silicon [26]. The simulated solar cell structures have the following layer sequence: TCO/a-Si:H(n)/a-Si:H(i)/c-Si(p)/a-Si:H(i)/a-Si:H(p)/TCO/Metal and TCO/a-Si:H(p)/a-Si:H(i)/c-Si(n)/a-Si:H(i)/a-Si:H(n)/TCO/Metal denoted as SHJp and SHJn, respectively. In the simulated models, the thicknesses of 5 and 10 nm were used for a-Si:H(i) and doped a-Si:H(n) and a-Si:H(p) layers, respectively. The band gap of a-Si:H(p) was set to 1.95 eV and the band gaps of a-Si:H(i) and c-Si(n) were set to 1.76 eV in accordance to [27]. The doping activation energies of 0.2 and 0.4 eV were used for a-Si:H(n) and a-Si:H(p) layers, respectively. The gap state densities of amorphous layers have a Gaussian distribution of dangling bonds and an exponential distribution of band tails was set together with additional parameters according to the literature [27]. While the main aim of the simulation is to describe recombination processes in the structure, flat silicon substrate conditions were used in the models. The silicon substrates with thickness of 200 μm, lifetime,
2. Open circuit voltage and carrier inversion
The output performance of the solar cells can be described by
Similarly for SHJn, the
Symbols in the above equations denote:
From the above equations it is apparent that
Similarly, by considering interface concentration of electrons
By taking into account the equation for
and substituting
for SHJp and

Figure 2.
Band diagram of (left) SHJn and (right) SHJp structures with sketched barrier for interface recombination
for SHJn, where
3. Front a-Si:H/c-Si heterointerface
3.1. Front a-Si:H/c-Si: influence of interface defect states
The front a-Si:H/c-Si heterointerface is a key part of the SHJ solar cell which has the main influence on the recombination processes in the structure and thus the output performance. The connection of two materials with different band gaps, lattice and electrical properties results into the formation of band discontinuity and defect states at the interface. Such properties are strongly affecting the carrier transport through that interface. In order to investigate the influence of

Figure 3.
(a) The
From the above discussion it is clear that the change of the charge properties in the SCR plays the key role for the carrier inversion at the heterointerface and strongly affects
3.2. Front a-Si:H/c-Si: influence of band alignment

Figure 4.
(a)
Comparing with the standard c-Si-based solar cells, the SHJs are characterized by the formation of a carrier inversion layer of minority carriers at the c-Si surface. The origin of this inversion layer steams from the presence of the band discontinuity at the interface and is the main factor for higher
In the case of the SHJn structure, the transport of photo-generated minority holes is affected by the valence band offset Δ
3.3. Front a-Si:H/c-Si: influence of a-Si:H(i) passivation layer
The most straightforward way to increase the carrier inversion at the c-Si surface is to decrease
A simulation study with a-Si:H(i) inserted at the heterointerface was carried out to describe the impact of

Figure 5.
(a)
3.4. Alternative concepts to obtain carrier inversion at emitter/c-Si interface
From the above discussion it is clear that high carrier inversion at the emitter/c-Si interface is crucial for high
The first alternative approach is based on the insertion of a highly doped c-Si layer of n+- and p+-type doping at the a-Si:H/c-Si interface of SHJp and SHJn solar structure, respectively [39, 40]. Such a highly doped layer with opposite doping of c-Si provides field passivation, and causes a shift of the Fermi level, which leads to an increase in carrier inversion at the c-Si surface. Our recent simulation study shows that by using the field effect passivation it is possible to decrease the sensitivity of
TMO with a high work function
4. Front TCO/a-Si:H heterointerface
4.1. Front TCO/a-Si:H: impact of parasitic Schottky barrier
The above simulation study revealed that
In the following simulation, the TCO is considered as a metal contact and the impact is simulated of low parasitic

Figure 6.
(a)
Similar effect of
5. The role of interfaces in SHJ working under concentrated light
Recently, possible utilization of silicon-based solar cells in light concentration applications became an attractive approach to increase the energy yield from such solar cell structures [51, 52]. Thus, it is of high interest to explore possible aspects connected with the SHJ solar cells for utilizations under concentrated light. Due to the formation of heterojunctions between a-Si:H layers and the c-Si absorption layer, the carrier transport has to overcome barriers at the front and back interfaces of the SHJ structure. Such barriers can significantly affect the collection of photo-generated carriers and thus the solar cell performance at high light intensity. Moreover, the increased light intensity absorbed by the solar cell represents a considerable amount of energy which is partially transformed to thermal energy and causes an increase of cell temperature. Because of this, the impact of the elevated temperature of such a solar cell is considered in the simulations as well. Figure 7(a) shows the efficiency as a function of concentrated light expressed in the suns (1 sun = 1000 W/m2) calculated at 300, 340 and 380 K for both SHJn and SHJp structures. As can be seen, the efficiency at 1 sun decreases with temperature for both SHJ structures. Such decreases are due to the increase of the saturation current caused by an increase of the intrinsic carrier concentration in the c-Si. Saturation current lowers the
ASA simulation was carried out to confirm the negative impact of the front Δ

Figure 7.
(a) Efficiency

Figure 8.
(a) Efficiency
From the above discussion it is clear that the presence of barriers for carrier transports has to be taken into account when the SHJ is designed for light concentration applications. While amorphous silicon forms higher Δ
Our recent study shows that the higher operation temperature has a beneficial effect not only in enhancement of the carrier transport through barriers formed by the a-Si:H/c-Si interface but also decreases the negative impact of the parasitic Schottky barrier at the TCO/a-Si:H interface [53]. The negative influence of such barriers is more significant for SHJn structure, where the Schottky barrier depletes the emitter and increases the negative influence of Δ
6. Conclusion
This chapter was devoted to a-Si:H/c-Si and TCO/a-Si:H heterointerfaces forming the front emitter stack with the aim to explain the influence of such heterointerfaces on
Acknowledgments
This work was supported by the Scientific Grant Agency of the Ministry of Education of the Slovak Republic and of the Slovak Academy of Sciences under project VEGA 1/0651/16 and Slovak Research and Development Agency under the contract APVV-15-0152.
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