Open access peer-reviewed chapter

Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography

By Grégory Barbillon

Submitted: April 4th 2012Reviewed: February 15th 2013Published: July 3rd 2013

DOI: 10.5772/56119

Downloaded: 3123

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Grégory Barbillon (July 3rd 2013). Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography, Updates in Advanced Lithography, Sumio Hosaka, IntechOpen, DOI: 10.5772/56119. Available from:

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