Open access

Tailoring Oxide/Silicon Carbide Interfaces: NO Annealing and Beyond

Written By

John Rozen

Submitted: 21 March 2012 Published: 16 October 2012

DOI: 10.5772/54396

From the Edited Volume

Physics and Technology of Silicon Carbide Devices

Edited by Yasuto Hijikata

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Written By

John Rozen

Submitted: 21 March 2012 Published: 16 October 2012