Open access peer-reviewed chapter

Tailoring Oxide/Silicon Carbide Interfaces: NO Annealing and Beyond

By John Rozen

Submitted: March 21st 2012Published: October 16th 2012

DOI: 10.5772/54396

Downloaded: 3166

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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John Rozen (October 16th 2012). Tailoring Oxide/Silicon Carbide Interfaces: NO Annealing and Beyond, Physics and Technology of Silicon Carbide Devices, Yasuto Hijikata, IntechOpen, DOI: 10.5772/54396. Available from:

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