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High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)

Written By

Sh Mohd Firdaus, Husna Omar and Ishak Abd Azid

Submitted: November 16th, 2011 Published: October 10th, 2012

DOI: 10.5772/48253

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Written By

Sh Mohd Firdaus, Husna Omar and Ishak Abd Azid

Submitted: November 16th, 2011 Published: October 10th, 2012