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Characterization of Sol-Gel-Derived and Crystallized HfO2, ZrO2, ZrO2-Y2O3 Thin Films on Si(001) Wafers with High Dielectric Constant

Written By

Hirofumi Shimizu and Toshikazu Nishide

Submitted: May 14th, 2011 Published: April 27th, 2012

DOI: 10.5772/35727

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Written By

Hirofumi Shimizu and Toshikazu Nishide

Submitted: May 14th, 2011 Published: April 27th, 2012