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Application of Molecular Dynamics Simulations to Plasma Etch Damage in Advanced Metal-Oxide-Semiconductor Field-Effect Transistors

Written By

Koji Eriguchi

Submitted: May 23rd, 2011 Published: April 11th, 2012

DOI: 10.5772/36394

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Written By

Koji Eriguchi

Submitted: May 23rd, 2011 Published: April 11th, 2012