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Ellipsometry and Its Applications in Stoichiometry

Written By

Yu-Xiang Zheng, Rong-Jun Zhang and Liang-Yao Chen

Submitted: April 28th, 2011 Published: April 11th, 2012

DOI: 10.5772/34175

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Written By

Yu-Xiang Zheng, Rong-Jun Zhang and Liang-Yao Chen

Submitted: April 28th, 2011 Published: April 11th, 2012