Open access peer-reviewed chapter

Ellipsometry and Its Applications in Stoichiometry

By Yu-Xiang Zheng, Rong-Jun Zhang and Liang-Yao Chen

Submitted: April 28th 2011Reviewed: November 4th 2011Published: April 11th 2012

DOI: 10.5772/34175

Downloaded: 3686

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Yu-Xiang Zheng, Rong-Jun Zhang and Liang-Yao Chen (April 11th 2012). Ellipsometry and Its Applications in Stoichiometry, Stoichiometry and Materials Science - When Numbers Matter, Alessio Innocenti and Norlida Kamarulzaman, IntechOpen, DOI: 10.5772/34175. Available from:

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