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Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst

Written By

Sachiko Ono and Hidetaka Asoh

Submitted: 01 May 2011 Published: 01 February 2012

DOI: 10.5772/34387

From the Edited Volume

Noble Metals

Edited by Yen-Hsun Su

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Written By

Sachiko Ono and Hidetaka Asoh

Submitted: 01 May 2011 Published: 01 February 2012