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Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst

Written By

Sachiko Ono and Hidetaka Asoh

Submitted: May 1st, 2011 Published: February 1st, 2012

DOI: 10.5772/34387

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Written By

Sachiko Ono and Hidetaka Asoh

Submitted: May 1st, 2011 Published: February 1st, 2012