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Controlled Growth of C-Oriented AlN Thin Films: Experimental Deposition and Characterization

Written By

Manuel García-Méndez

Submitted: 24 February 2011 Published: 13 January 2012

DOI: 10.5772/28040

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Written By

Manuel García-Méndez

Submitted: 24 February 2011 Published: 13 January 2012