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Development of 2" AlN Substrates Using SiC Seeds

Written By

O.V. Avdeev, T.Yu. Chemekova, E.N. Mokhov, S.S. Nagalyuk, H. Helava, M.G. Ramm, A.S. Segal, A.I. Zhmakin and Yu.N. Makarov

Submitted: March 11th, 2011 Published: January 13th, 2012

DOI: 10.5772/29853

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Written By

O.V. Avdeev, T.Yu. Chemekova, E.N. Mokhov, S.S. Nagalyuk, H. Helava, M.G. Ramm, A.S. Segal, A.I. Zhmakin and Yu.N. Makarov

Submitted: March 11th, 2011 Published: January 13th, 2012