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Evaluation of Nanometer Cutting Tool Edge for Nanofabrication

Written By

Yuki Shimizu, Takemi Asai and Wei Gao

Submitted: March 1st, 2011 Published: December 22nd, 2011

DOI: 10.5772/28581

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Written By

Yuki Shimizu, Takemi Asai and Wei Gao

Submitted: March 1st, 2011 Published: December 22nd, 2011