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Shear Mode Piezoelectric Thin Film Resonators

Written By

Takahiko Yanagitani

Submitted: October 29th, 2010 Published: November 14th, 2011

DOI: 10.5772/18797

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Written By

Takahiko Yanagitani

Submitted: October 29th, 2010 Published: November 14th, 2011