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Shear Mode Piezoelectric Thin Film Resonators

Written By

Takahiko Yanagitani

Submitted: 29 October 2010 Published: 14 November 2011

DOI: 10.5772/18797

From the Edited Volume

Acoustic Waves - From Microdevices to Helioseismology

Edited by Marco G. Beghi

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Written By

Takahiko Yanagitani

Submitted: 29 October 2010 Published: 14 November 2011