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Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts

Written By

Sanjeev Kumar Gupta and Jamil Akhtar

Submitted: November 9th, 2010 Published: October 10th, 2011

DOI: 10.5772/20465

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Written By

Sanjeev Kumar Gupta and Jamil Akhtar

Submitted: November 9th, 2010 Published: October 10th, 2011