Open access peer-reviewed chapter

Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts

By Sanjeev Kumar Gupta and Jamil Akhtar

Submitted: November 9th 2010Reviewed: April 11th 2011Published: October 10th 2011

DOI: 10.5772/20465

Downloaded: 7181

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Sanjeev Kumar Gupta and Jamil Akhtar (October 10th 2011). Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts, Silicon Carbide - Materials, Processing and Applications in Electronic Devices, Moumita Mukherjee, IntechOpen, DOI: 10.5772/20465. Available from:

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