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Atomic Layer Deposition of High-k Oxides on Graphene

Written By

Harry Alles, Jaan Aarik, Jekaterina Kozlova, Ahti Niilisk, Raul Rammula and Väino Sammelselg

Submitted: November 10th, 2010 Published: September 15th, 2011

DOI: 10.5772/20801

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Written By

Harry Alles, Jaan Aarik, Jekaterina Kozlova, Ahti Niilisk, Raul Rammula and Väino Sammelselg

Submitted: November 10th, 2010 Published: September 15th, 2011