Open access peer-reviewed chapter

Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering

Written By

Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen

Submitted: May 17th, 2010 Reviewed: October 18th, 2010 Published: March 16th, 2011

DOI: 10.5772/14049

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Written By

Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen

Submitted: May 17th, 2010 Reviewed: October 18th, 2010 Published: March 16th, 2011