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Piezoelectric Thin Film Deposition: Novel Self-Assembled Island Structures and Low Temperature Processes on Silicon

Written By

Sharath Sriram, Madhu Bhaskaran and Arnan Mitchell

Published: October 5th, 2010

DOI: 10.5772/9937

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Written By

Sharath Sriram, Madhu Bhaskaran and Arnan Mitchell

Published: October 5th, 2010