TY  - CHAP
AU  - Ryszard Korbutowicz
AU  - Joanna Prazmowska
ED  - Jan Grym
Y1  - 2010-04-01
PY  - 2010
T1  - Wet Thermal Oxidation of GaAs and GaN
N2  - Semiconductor technologies continue to evolve and amaze us. New materials, new structures, new manufacturing tools, and new advancements in modelling and simulation form a breeding ground for novel high performance electronic and photonic devices. This book covers all aspects of semiconductor technology concerning materials, technological processes, and devices, including their modelling, design, integration, and manufacturing.
BT  - Semiconductor Technologies
SP  - Ch. 6
UR  - https://doi.org/10.5772/8555
DO  - 10.5772/8555
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-26
ER  -