TY  - CHAP
AU  - Imtisal Akhtar
AU  - Malik Abdul Rehman
AU  - Yongho Seo
ED  - Phuong Pham
ED  - Pratibha Goel
ED  - Samir Kumar
ED  - Kavita Yadav
Y1  - 2020-07-31
PY  - 2020
T1  - Measuring the Blind Holes: Three-Dimensional Imaging of through Silicon via Using High Aspect Ratio AFM Probe
N2  - Surface sciences elucidate the physical and chemical aspects of the surfaces and interfaces of materials. Of great interest in this field are nanomaterials, which have recently experienced breakthroughs in synthesis and application. As such, this book presents some recent representative achievements in the field of surface science, including synthesis techniques, surface modifications, nanoparticle-based smart coatings, wettability of different surfaces, physics/chemistry characterizations, and growth kinetics of thin films. In addition, the book illustrates some of the important applications related to silicon, CVD graphene, graphene oxide, transition metal dichalcogenides, carbon nanotubes, carbon nanoparticles, transparent conducting oxide, and metal oxides.
BT  - 21st Century Surface Science
SP  - Ch. 14
UR  - https://doi.org/10.5772/intechopen.92739
DO  - 10.5772/intechopen.92739
SN  - 978-1-78985-200-4
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-26
ER  -