TY  - CHAP
AU  - Nenad V. Delić
AU  - Jovan P. Šetrajčić
AU  - Dragoljub Lj. Mirjanić
AU  - Zdravko Ivanković
AU  - Dobrivoje Martinov
AU  - Snežana Jokić
AU  - Ivana Petrevska–Đukić
AU  - Dušanka Tešanović
AU  - Svetlana Pelemiš
ED  - Kenichi Takahata
Y1  - 2009-12-01
PY  - 2009
T1  - Single Photon Eigen-Problem with Complex Internal Dynamics
N2  - This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
BT  - Micro Electronic and Mechanical Systems
SP  - Ch. 27
UR  - https://doi.org/10.5772/7026
DO  - 10.5772/7026
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-27
ER  -