TY - CHAP AU - Miona Andrejević Stošović AU - Vančo Litovski ED - Kenichi Takahata Y1 - 2009-12-01 PY - 2009 T1 - ANN Application to Modelling of the D/A and A/D Interface for Mixed-mode Behavioural Simulation N2 - This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. BT - Micro Electronic and Mechanical Systems SP - Ch. 21 UR - https://doi.org/10.5772/7020 DO - 10.5772/7020 SN - PB - IntechOpen CY - Rijeka Y2 - 2024-04-16 ER -