TY - CHAP AU - Boris Lončar AU - Miloš Vujisić AU - Koviljka Stanković AU - Predrag Osmokrović ED - Kenichi Takahata Y1 - 2009-12-01 PY - 2009 T1 - Radiation Hardness of Semiconductor Programmable Memories and Over-Voltage Protection Components N2 - This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. BT - Micro Electronic and Mechanical Systems SP - Ch. 20 UR - https://doi.org/10.5772/7019 DO - 10.5772/7019 SN - PB - IntechOpen CY - Rijeka Y2 - 2024-04-26 ER -