TY  - CHAP
AU  - Elena Kralkina
AU  - Andrey Alexandrov
AU  - Polina Nekludova
AU  - Aleksandr Nikonov
AU  - Vladimir Pavlov
AU  - Konstantin Vavilin
AU  - Vadim Odinokov
AU  - Vadim Sologub
ED  - Zdravko Stanimirović
ED  - Ivanka Stanimirović
Y1  - 2019-01-17
PY  - 2019
T1  - Physical Processes and Plasma Parameters in a Radio-Frequency Hybrid Plasma System for Thin-Film Production with Ion Assistance
N2  - To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic.
BT  - Micromachining
SP  - Ch. 5
UR  - https://doi.org/10.5772/intechopen.82870
DO  - 10.5772/intechopen.82870
SN  - 978-1-78923-810-5
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-19
ER  -