TY  - CHAP
AU  - Feng Shi
ED  - Dr. Feng Shi
Y1  - 2018-11-05
PY  - 2018
T1  - Introductory Chapter: Basic Theory of Magnetron Sputtering
N2  - <p>
	This book aims to state the physical deposition technologies for different kinds of thin films,such as ceramics, metals and so on. The fabrication process and conditions of thin films, physical properties of these materials, and the relationship of structures-properties will be stated in detail, including microstructures and morphologies. This book will show people the novel development of thin films by magnetron sputtering.</p>
BT  - Magnetron Sputtering
SP  - Ch. 4
UR  - https://doi.org/10.5772/intechopen.80550
DO  - 10.5772/intechopen.80550
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-05-10
ER  -