TY - CHAP AU - Zhuoqing Yang AU - Yi Zhang ED - Jagannathan Thirumalai Y1 - 2017-04-12 PY - 2017 T1 - Lab-on-a-Tube Surface Micromachining Technology N2 - The book Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets presents topics on global advancements in theoretical and experimental facts, instrumentation and practical applications of thin-film material perspectives and its applications. The aspect of this book is associated with the thin-film physics, the methods of deposition, optimization parameters and its wide technological applications. This book is divided into three main sections: Thin Film Deposition Methods: A Synthesis Perspective; Optimization Parameters in the Thin Film Science and Application of Thin Films: A Synergistic Outlook. Collected chapters provide applicable knowledge for a wide range of readers: common men, students and researchers. It was constructed by experts in diverse fields of thin-film science and technology from over 15 research institutes across the globe. BT - Thin Film Processes SP - Ch. 5 UR - https://doi.org/10.5772/66664 DO - 10.5772/66664 SN - 978-953-51-3068-0 PB - IntechOpen CY - Rijeka Y2 - 2024-03-29 ER -